LAMP 
 * LAMP
AMAT # 1010-01424 : 120V, 600W
AMAT # 1010-01116 : 120V 800W
AMAT #1010-01088 : 120V, 1000W
LAMP
MFC UNIT 8161 
 MFC UNIT 8161 °Ë±³Á¤¹× ¼ö¸®,GAS ¿ë·®º¯°æ
MFC UNIT 8161
MFC_UNIT 1660 
 MFC 1660 °Ë±³Á¤¹× ¼ö¸®, gas ¿ë·®º¯°æ
MFC_UNIT 1660
susceptor tc 
 AMAT BRAND NEW TC
#0190-09062, SUSCEPTOR TC
#0190-35172, P CHUCK TC
#0190-01168, 300mm aln heater tc
#0190--1403, wxz heater tc
susceptor tc
LAMP(1000W,800W) 
 INFRARED LAMP
AMAT # 1010-01116 : 120V 800W
AMAT #1010-01088 : 120V, 1000W
LAMP(1000W,800W)
¿Â½Àµµ ±â·Ï°è 
 ¿Âµµ : -20 ~ 80 ¡É
½Àµµ : 0 ~ 100%RH
ÃøÁ¤°ªÀ» ±â·ÏÁö¿¡ ±â·Ï¹× DISPLAY
¿Â½Àµµ ±â·Ï°è
thermocouple gauge 
 vaccum transducer(tc gauge)
AMAT # 3310-01071
NOVELLEUS #60-00180-00
thermocouple gauge
MFC 
 * MFC USED & NEW °ø±Þ°¡´É
STEC: SEC4400MC, 7440MC
UNIT : 1660, 8160, 8161
HITACHI : SFC1480 (ONLY NEW)
MKS, BROOKS, AREA, TYLAN
MFC
¿Â½Àµµ monitoring system
¿Â½Àµµ monitoring sy..
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